Better Pumps for Better Yield!

LEVIFLOW™ Flow Sensors

LEVIFLOW™ flowmeters are designed to provide non invasive high precision flow measurements of high purity fluids. The standard configuration of the LEVIFLOW™ flowmeters consists of a flow sensor and a converter with a digital signal processor (DSP) for processing the sensor signals.

Five flow sensor sizes are available to allow measurement of flows from the ml/min range up to 80 l/min. Various output signals (analog, digital input and digital output) are provided and can be configured with provided PC software. A two wire RS485 bus allows arrays of multiple flowmeters. In addition, the sensor value is shown on a 4-digit display.

For high volume applications a multi-channel converter is available, which processes 6 sensors with one single converter. The sensor signals are available over a RS485 two wire bus, hence reducing significantly cabling, space and costs.

System Benefits

  • No contamination due to non-invasive measurement
  • High accuracy (1% of reading) and repeatability (≤ 0.5%)
  • No moving parts -> no particle generation
  • Improved bubble robustness due to DSP technology
  • High precision flow control together with Levitronix MagLev Pumps
  • Easy configurable flow sensor parameters (PC software)

Applications

  • High purity liquid processes in Semiconductor manufacturing
  • CMP slurry flow control
  • Sterile non-invasive flow measurement in Pharmaceutical manufacturing
  • Flow control in combination with Levitronix® MagLev pump systems
Flow Sensor Sets
Flow Sensor Sets
Flow Sensors
Flow Sensors
Converter
Converter
Accessories
Accessories